D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ​
≤ 5SCCM flow control has been very critical in high aspect ratio process.​
Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM.

Сегмент: Semiconductor
Подразделение: Fluid Control
Производитель: HORIBA STEC, Co., Ltd.
  • Down to 0.025SCCM flow control capability
    • Precise tuning gas control, enhance process tunability
  • ≤ 100ms Step-up Response & MFC-to-MFC deviation control​
    • Deliver high productivity and greater process performance​
  • In-House flow metrology
    • Reliable performance from all manufactured products
  • State Monitor Function
    • Provide more internal data for smarter failure prediction
  • Better Valve Shut-off and Corrosion Resistance by PFA nozzle​
    • Robustness with less particle risk reduce down time and optimize yield

 

*1:Please contact us for supported gas type and full scale flow rate.
*2:Flow rate accuracy can be guaranteed down to 0.1 SCCM N₂ equivalent.
*3:This is guaranteed value under 25 ℃ and ≤ 1.0 × 10-3 Pa(A).
*4:This is guaranteed under our conditions using calibration N₂ gas. Setting time may vary depending on the gas type and operating environment conditions.
*5:Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec(±10 PSI/sec).
*6:EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.

Запросить информацию

У вас есть вопросы или пожелания? Используйте эту форму, чтобы связаться с нашими специалистами.

* Эти поля обязательны для заполнения.

Related products

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

APMC-370
APMC-370

Мультигазовый калибратор загрязнения воздуха

ASGU-370P
ASGU-370P

Automatic Span Gas Unit for Parallel calibration

ASGU-370S
ASGU-370S

Automatic Span Gas Unit for Serial calibration

ASGU-370TS
ASGU-370TS

Automatic Span Gas Unit Transferstandard

ASGU-370TS SPLIT
ASGU-370TS SPLIT

Automatic Span Gas Generator Unit for Quality control at field test

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

FS-3000
FS-3000

Thermal Flow Splitter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VG-200S
VG-200S

Capacitance Manometer

серия ASGU-370
серия ASGU-370

Автоматическая газогенераторная установка

Corporate