Application liquid | H2O/IPA/TEOS/SiCl4 Please contact HORIBA if you require vaporizing any liquid materials that are not listed here. |
Maximum vaporization volume (gas flow rate) | H2O : 10g/min (12.4 SLM) IPA : 30g/min (11.1 SLM) TEOS : 50g/min(5.3 SLM) SiCl4 : 130g/min(17.1 SLM) |