Flex-CLUE is the ideal flexible package to handle highperformance CL analysis, for a wide range of applications, within an affordable budget. Based on a dedicated fiber-optic interface, Flex- CLUE offers a compact and remote CL solution perfectly adapted to an SEM environment where space or access is limited.


  • Maintains original SEM functionality
  • High-efficiency CL signal-collection
  • Flexible spectral CL analysis

Manufactured by HORIBA Scientific



  • High efficiency optics designed to match fiber with spectrometer aperture

Collection interface

  • 200 mm retraction mechanism
  • Manual version
  • Fine adjustment under vacuum
  • Diamond–turned mirror
  • Short working-distance mirror in option


  • Focal length from 140 to 320 mm
  • Large choice of diffraction gratings
  • Single or dual-port


  • Panchromatic imaging
  • Monochromatic imaging
  • Spectral analysis
  • Hyperspectral spectroscopy analysis
  • Multiple detection options (up to 2)
  • Large choice of detectors

    • Single or multi-channel
    • Thermoelectric or cryogenic cooling
    • UV, visible or near-IR

 Spectral coverage

  • UV-Visible optical fiber 200-1000 nm
  • Visible-near-IR optical fiber 400-1700 nm

CL ouputs

  • Up to 1

Electron beam control

CLLINK Controller:

  • Multiple acquisition processing
    (Analog, pulse mode, SE)
  • Mapping, line scan, point measurement
  • Complete synchronization with detection
  • Control by external scan input on SEM


  • LabSpec Spectroscopy and Imaging suite


CLUE Series