nanoGPS OxyO Scale

Key features

• Snapshot determination of 3 absolute coordinates
• Repositioning accuracy in the nm range (x, y) and 10 μrad (θ)
• Easier to deploy and cheaper than a laser interferometer system
• Based on your existing image acquisition system
• Can be easily installed/disinstalled, i.e. for verification or calibration operations
• Can be used as an upgrade or retrofit of existing stage assemblies
• In the case of a planar stage + rotation stage assemblies: cheaper and more accurate than conventional optical scale solutions
• Coded zone: ranging from 3 mm x 3 mm to 300 mm x 300 mm or more

Typical use cases

• Provides reliable overnight automation (repositioning accuracy less than 10nm)
• Detects and solves positioning issues in a microscope (stability of the mount, perturbation by the lab environment, accuracy of a moving stage)
• Adds to Machine Vision the capability to determine trajectories, positionning accuracy and reproducibility
• When moving a part between 2 machines, allows precise repositioning of the part in each machine

Scientific publications

• Acher, O. & Nguyen, T. L. Turning a machine vision camera into a high precision position and angle encoder: nanoGPS-OxyO. in Proc.SPIE vol. 11056 (2019).