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Plasma Profiling TOFMS

Plasma Profiling TOFMS video: short introduction to PP-TOFMS technique
Plasma Profiling TOFMS webinar: PP-TOFMS in the cleanroom of CEA-LETI

Ultra-Fast, Sensitive and High Resolution Depth Profiling technique

Plasma Profiling TOFMS addresses the needs of materials scientists across a wide range of application areas. PP-TOFMS provides fast elemental depth distribution of any inorganic material. The speed and ease of use of PP-TOFMS permit to reduce optimization time of growth processes as many research scientists strive to reduce the time from discovery to applications of new materials.

The simultaneous full coverage of TOFMS available for each point of depth permits the detection of non suspected contamination. This is key for failure analysis and optimization of thin film processes that tend to no longer be based on ultra-high grade methods (i.e. ink jet printing…).

PP-TOFMS is an ideal close-to-process tool for materials scientists:

  • To check on stoichiometry versus depth of layers ranging from nm to tens of microns
  • To determine doping depth distribution
  • Identify unsuspected contamination
  • Monitor interface composition and width
Segment: Scientific
Abteilung: GDOES
Produktionsfirma: HORIBA France SAS

PP-TOFMS instrument is

  • Compact
  • Rapid
  • Easy to get hands on
  • General application in materials science
  • Multi-user




  • Glow discharge Plasma Source
  • Unique patented RF pulsing mode
  • No sample preparation, no sample transfer in UHV environment
  • Easy (flat Horizontal) and ergonomic sample positioning with laser help
  • High sample tolerance size from 0.7 cm to 30 cm
  • Standard 4 mm anode (4 mm ⌀ crater)
  • Available 2 mm anode (2 mm ⌀ crater)
  • Oil free environment (Dry pump)
  • Easy removal and cleaning of source parts


TOF analyzer

  • Orthogonal extraction
  • High resolution reflectron (resolving power up to 5000 at 208 Th)
  • User friendly, ergonomic, fast hands on
  • Possibility to filter out up to four intense ions for high dynamics: user choice of ions and attenuation amplitude



  • Fast automatic starting procedures
  • Real time display of depth profiles
  • One click semi-quantitative depth profile
  • Remote online capability


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