Resistivity Meter for Semiconductor Cleaning Processes

A specific resistance meter ideal for monitoring the purity of ultra-pure water used in cleaning processes.

It accurately measures ultra-pure water during processes thanks to its microprocessor integration.  This contributes to purity monitoring of ultra-pure water used as the final cleaning water for silicon wafers and other applications.


DC24VTransmission OutputContact OutputSingle Component

Segmento: Semiconductor
Fabricante: HORIBA Advanced Techno Co., Ltd.

High Precision

Based on the temperature characteristics of ultra-pure water, the microprocessor calculates the temperature compensation coefficient and automatically converts it to a 25°C specific resistance.

High-precision Temperature Compensation

By using a platinum temperature sensor (Pt1000Ω) as the temperature compensation element, it allows for high-precision temperature compensation within the range of 0 to 100°C.

Abundant Temperature Compensation Features

Allowing for temperature compensation options such as pure water, ultra-pure water with impurities, and user-defined temperature compensation, enabling temperature compensation tailored to the liquid to be measured.

Product nameIndustrial resistance meter
Measurement methodElectrode type (2-electrode method)
Cell constant0.01 / cm
Temperature sensor
Platinum resistance 1000 Ω / 0 °C
Measuring rangeMeasurement unitkΩ·m0 to 2.000 to 20.00 to 200.00 to 1000 *
MΩ·cm0 to 0.2000 to 2.000 to 20.000 to 100.0 *
*: Measurable without temperature compensation
Temperature: 0 °C to 100 °C (Select your desired decimal point from 0, 1, and 2 digits.)
Repeatability Within± 0.5 % of the full scale (in equivalent input)
Linearity Within± 0.5 % of the full scale (in equivalent input)
4 mA to 20 mA DC: input / output isolated type
Maximum load resistance: 900 Ω
Transmission output range: Freely selectable within the measurement range
Contact outputOutputs: 2 points
Alarm contact output (R1 and R2)
Contact type: relay contact, SPDT (1c)
Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
Contact function: selectable from upper / lower limit operation (ON / OFF control), alarm, and maintenance.
output hold feature
  • Previous value hold
  • Optional value hold
  • Continuous
Selectable from the above (However, only the previous value hold is available in the maintenance Mode.)
  • Sensor diagnosis
  • Out of the measurement range
  • A/D converter scale over
  • Converter error
  • Based on the temperature characteristics of extra deionized water (reference temperature: 25 °C)
  • Based on the reference temperature and user-defined temperature coefficient (reference temperature: 5 °C to 95 °C)
  • No temperature compensation
Temperature - compensated range0 °C to 100 °C
Power supplyRated voltage 100 V to 240 V AC, 50 / 60 Hz, 10 VA (max.)
StructureIndoor-use panel installation type
Panel: IP65 dust and water proof structure
Protective structurePanel: IP65 (IEC60529, JIS C0920)
Conforming standardsCE Marking
FCC Rule
48 (W) mm x 96 (H) mm x 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)
MassApprox. 400 g
ERF-series, cell constant 0.01 / cm


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