Wide range TMAH Concentration Monitor
Featuring a highly chemical-resistant 4-pole carbon sensor, allowing the measurement of TMAH concentration, the main component of photoresist developer solutions, over a wide range.
Wide-range compatibility
Measurement is possible in the TMAH concentration range of 0.000% to 10.00% with automatic decimal point adjustment.
Automatic switching of display range
Automatically switches the display range from high to low concentration. Furthermore, it is feasible to monitor changes while preserving effective conductivity resolution.
Sensor with excellent chemical resistance
This sensor employs a chemically resistant 4-pole flow-through glass carbon sensor.
3 measurements
Capable of three types of measurements: TMAH concentration, conductivity, and temperature.
Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics. It is particularly suitable for dilution management of low-concentration chemicals.
Indication Converter
| Model | HE-960H-TM |
|---|---|
| Measurement range | 0 - 10% |
| Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation) |
| Power supply | 24 V DC ±10%, 10 W (max.) |
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
| Mass | Approx. 550 g |
| Conforming standards | CE marking, FCC Part 15 |
| Compatible sensors | FES-510 series (flow-type carbon sensor) |
Schematics
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