HF-960H

HF / HCl Concentration Monitor

Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.

Segmento: Semiconductor

Divisão: Wet Process Control

Fabricante: HORIBA Advanced Techno Co., Ltd.

Measurement range : 0 - 10 %
Automatic display range switching
Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
24 V DC power supply
RoHS compliant

Model	HF-960H
Measurement range	HF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm
Power supply	24 V DC ±10%, 10 W (max.)
Protective structure	Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass	Approx. 550 g
Conforming standards	CE marking, FCC Part 15
Compatible sensors	FES-510 Series (flow-type carbon sensor)