Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

A concentration monitor ideal for high-precision measurements of low-concentration hydrofluoric acid, hydrochloric acid, and ammonia.

With a sensor that has excellent corrosion resistance, it can accurately and quickly measure low concentrations of hydrofluoric acid, hydrochloric acid as well as ammonia. This makes it ideal for single-bath cleaning and batch cleaning applications.

CONDChemical Concentration

DC24VTransmission OutputContact OutputRS-485Single ComponentLow Concentration

Segmento: Semiconductor
Fabricante: HORIBA Advanced Techno Co., Ltd.

Compatible with Five Types of Measurements

Accommodating five types of measurements: HF concentration, HCl concentration, NH₃ concentration, conductivity, and temperature.  For HF concentration, HCl concentration, and NH₃ concentration, temperature compensation measurements are conducted based on their respective temperature characteristic data.

Accurate Measurements with High Reproducibility of Low-concentration HF Concentration

Measurement is possible with high reproducibility within ±25ppm. The display resolution is equivalent to 0.5%, which is 5000ppm.  Catering to low-concentration requirements by providing ppm-level readings.

Abundant Output Options

Able to provide a wide range of outputs, not only for upper and lower concentration limits but also for concentration abnormalities and abnormal sample measurement outputs. (7 output points)

Analog Output can be set Arbitrarily within the Concentration Measurement Range

It is possible to set the analog output range within the measurement range of 0-200%, allowing for a finer output of concentration values.

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics.  It is particularly suitable for the dilution management of low-concentration chemical solutions.

Product name

Low Concentration Type HF / HCl / NH3 Concentration Monitor



Measurement rangeHF: 0 - 5000 ppm, HCl: 0 - 5000 ppm, NH3: 0 - 10000 ppm, Conductivity:0 - 50.0 mS/cm

Power supply

Rated voltage 24 V DC, 10 W (max)


Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure

External dimensions

96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted)


Approx. 550 g

Conforming standards

CE marking, FCC Part15

Compatible sensors

FS-10F series flow-type sensor


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