PoliSpectra® 135

Multichannel Spectrometer and Hyperspectral Line Imager

HORIBA has developed a high-performance rugged spectroscopy platform that is factory-configurable for use in a multichannel or hyperspectral imaging system. This system can be configured with our Sylent® 2D sCMOS camera, low-cost cameras, or even customer-supplied sensors. In hyperspectral imaging applications, this system can be used as a line-scanning instrument (push-broom) that collects full spectral data simultaneously across the input slit height.

Variations

  • Multichannel (M135) vs. lens-based or bare slit (H135)
  • Two gratings to choose from: UV-NIR or VIS-NIR
  • Default sensors are the Sylent sCMOS cameras (cooled to -25° C or uncooled), or any customer preferred sensor

For OEM Industrial Applications

  • Optical Emission Spectroscopy (OES)
  • Fluorescence
  • Hyperspectral Line Imaging
  • Semiconductor Inspection and Metrology
  • Semiconductor Process Monitoring
  • Aerial Reconnaissance

 

*Available in select countries.

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

Segment: Scientific
Výrobní společnost: HORIBA Scientific
  • Up to 96 fiber channels with simultaneous readout (factory configurable)
  • Ultraviolet hyperspectral line imaging (180-1050 nm)
  • High throughput combined with low stray light
  • 2D scientific CMOS with high quantum efficiency and low noise

 

Spectral Line Width Graphs

The wavelength resolution specification establishes the maximum width (FWHM) of all spectral lines on all channels. This is a more stringent requirement than using the mean as the specification.

 

A lens-based hyperspectral H135’s resolution is dependent on the grating, slit, and f/# of the lens used.

OEM Spectrometer Selection Guide

View and Download our OEM Spectrometer Selection Guide

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

General Spectrometer Specifications

PoliSpectra 135VIS-NIR GratingUV-NIR Grating
Grating Efficiency Range (nm)300-1050185-900
Configurable RangeSensor dependent; see spectral range table
F/#F/2.3
Focal Length (nm)135.0
Spectral Resolution (20 μm slit) (nm) 11.02.0
Grating Dispersion (nm/mm)34.7
Grating Blaze (nm)575280
Grating Groove Density (lines/mm)401239
Weight (no camera) (lbs.)4.7
Weight (with uncooled camera) (lbs.)6.0
Weight (with cooled camera) (lbs.)10.4
Max Keystone (μm)<15
Spectral Tilt (μm) 2<15
Crosstalk (%) 3<1.5<1.7
Stray Light (%) 4<0.2<0.3
Multichannel Fiber Configuration
Multichannel Fibersup to 96
Wavelength Accuracy (nm)<0.1
Smile (μm) 5NA
Line Imaging Configuration
Lens Optionc-mount
Max Spatial Image Height (mm)20.0
Magnification1:1
Wavelength Accuracy (nm)<0.4
Spatial Resolution (μm)6.09.0
Smile (μm) (line imaging)<15

1 Max spectral line width (FWHM) for all peaks in the image.
2 Versus a sensor row.
3 The Crosstalk % can be further reduced with more dead space between channels. Measured on one channel (off), with all other channels illuminated. See Cross Talk Calculation figure on pages following.
4 Stray light measured using a BP filter: Baseline light level (outside the band) divided by the BP peak (unsaturated).
5 Smile is eliminated by using channel calibration coefficients.

Spectral Resolution vs. Slit Size

Best Spectral Resolution (nm)*
Slit Width (μm)223545100200
UV-NIR Grating (280 nm blaze)2.02.75.36.512.3
VIS-NIR Grating (575 nm blaze)1.01.51.93.87.2

* Ignoring pixel limitations, which are sensor-dependent. Specification is the maximum width (FWHM) of all spectral lines on all channels (or rows) on the image. Any size slit is orderable (for OEM quantities).

Spectral Range vs. Grating and Sensor Choice

 VIS-NIRVIS-NIR
SensorDigital Resolution (nm/px)*Range (nm)Low Example (nm)High Example (nm)Digital Resolution (nm/px)*Range (nm)Low Example (nm)High Example (nm)
1.3 MP-XX-9.76-BI0.3434300-734616-10500.6727200-927323-1050
1.3 MP-XX-9.76-BI0.2462300-762588-10500.4775200-975275-1050
1.3 MP-XX-9.76-BI0.4782300-10500.61311200-1050
IMX1740.2394400-7940.3660TBD

*Average digital resolution AKA digital dispersion

 

Sensor Options

      Read Noise (median)      
NameSensor TypeEffective PixelsPixel Size (μm)Active PixelsActive Photosensitive Area (mm)STD (e-)CMS (e-)ADC (bits)ShutterFull WellDynamic/Range (dB)QECooling
  
1.3 MP-XX-9.76-BIBack-illuminated sCMOS1.3 MP9.76 x 9.761024 x 12809.994 x 12.4931.60.912, 16
(HDR-mode), 32 1
Rolling48 ke-90.0Up to 90%Uncooled or -25° C
4.2 MP-XX-6.5-BIBack-illuminated sCMOS4.2 MP6.5 x 6.52048 x 204813.312 x 13.3121.61.212, 16
(HDR-mode), 32 2
Rolling53 ke-89.5Up to 95%Uncooled or -20° C
4.2 MP-XX-11-BIBack-illuminated sCMOS4.2 MP11 x 112048 x 204822.528 x 22.5281.6N/A12, 16
(HDR-mode), 32 2
Rolling80 ke-93.9Up to 95%Uncooled or -20° C
IMX174CMOS2.3 MP5.86 x 5.861216 x 19367.126 x 11.3457.410, 12Global30 ke-71.7Up to 78%Uncooled

1 In binned spectra mode. 
2 In binned spectra mode (roadmap).

Other sensor options:
EMCCD
CCD (eshutter)
Customer sensors (factory installed only)

Input Options

   Speed (FPS) 
Input Examples
Other configurations available upon request
Fiber
Type
Throughput1.3 MP-XX-9.76-BI14.2 MP-XX-6.5-BI14.2 MP-XX-11-BI1
Sony IMX1742Notes
Single ChannelRound-to-LineExtreme203623664 
4-Channels200 μmGood198155164322 
4-Channel High Throughput (OES Multitrack)BundleVery Good645862165 
8-Channels200 μmGood107132141284 
18-Channels100 μmLow4196106212 
34-Channels70 μmLow235358N/A 
34-Channels100 μmLow245762N/A 
Imaging Fiber4 μm x 100 k fibersMeduim134332358586VIS Only
(365 nm +)
Full Chip Hyperspectral Line Imaging
(Lens or Bare Slit)
N/ADepends on # of
rows binned
203623664Slit to camera imaging is 1:1

1 HDR mode
2 12-bit mode

 

Mechanical Drawings

Download Mechanical Drawings

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