For ease of use and convenient setup to all aspects of process development the PlasmaScope has been designed as a portable instrument, while the DIGICPM is a fixed system including exactly same hardware and software platform. This integrated version offers unique capabilities for significant gain and efficiency of full process control regarding plasma spectra, etching end-point detection status, plasma fault status, etc provided by the DIGICPM. The DIGICPM system combined with its very versatile software framework allows an easy fab and OEM integration.

Hergestellt von HORIBA Scientific