CS-100 Series

Stand-alone Type Chemical Concentration Monitor

A series of chemical concentration monitors for various chemicals used in the wet process.

The optimal model to suit chemicals from among over 100 different applications can be chosen.  Measurements of the concentration of each component can be taken in real-time, providing notifications using alarms to signal the timing of chemical exchange and automatic replenishment. Short measurement cycles to faithfully track concentration changes can be achieved.

Chemical Concentration

AC(100-240V)Transmission OutputContact OutputRS-232CMulti Component

Segment: Semiconductor
Produktionsfirma: HORIBA Advanced Techno Co., Ltd.

Real-time Concentration Tracking

Achieve concentration management for a 300mm process with measurement cycles of approximately 3 seconds. Supports precise concentration management for various types of cleaning equipment.

Simple Management

Measurement is fully automated, without the need for manual control once the measurement has started. Users can achieve easy management by simply injecting the chemical.  Furthermore, since reference spectrum measurements use air, water is not required as a utility for routine measurements.

Prevention of Bubbles

A degassing function has been incorporated to separate bubbles from liquids just before the flow cell.  Possible to take continuous measurements while the liquid is flowing.

Model name

Measurement principleAbsorption spectroscopic method
Sample temperature20 to 30 Degree C
Ambient temperature20 to 25 Degree C
ComponentsMax. 4 components
Chemical rangeMax. 4 ranges
CommunicationParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 components
Dimension205(W) X 329(D) X 269(H)mm
Power sourceDC 24V
Consumable partsHalogen lamp
Wetted materialPTFE, PFA, Sapphire or Quartz





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