Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC

Carbon Sensor Conductivity Meter (High concentration type)

A high-concentration conductivity meter ideal for chemical solutions and wastewater management in semiconductor manufacturing and FPD (Flat Panel Display) manufacturing processes.

This unit employs a chemical-resistant 4-pole carbon sensor.  It can measure across a wide-range without actually switching, and is equipped with a concentration conversion function, making it suitable for measuring the conductivity of a wide range of chemicals used in processes such as semiconductor cleaning.


DC24VTransmission OutputRS-485Single Component

Segment: Semiconductor
Produktionsfirma: HORIBA Advanced Techno Co., Ltd.

Wide-range compatible

Capable of measuring up to 1000 mS/cm. (The measurement range of conductivity before temperature compensation)

Automatic switching for display range

Automatically switching display range from high concentration to low concentration.  Furthermore, it is possible to monitor changes while maintaining effective conductivity resolution.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical  concentration and conductivity along with the temperature characteristics.

High quality chemical-resistant sensor

A chemical-resistant 4-pole carbon sensor is in use, making it compatible with a wide range of chemical solutions used in semiconductor cleaning processes.

Measurement range0 - 1000mS/cm
Wetted materialsGC, Karletz, PFA
Sensor input1 ch
Repeatability+/- 0.5% of the full scale (in equivalent input)
Linearity+/- 0.5% of the full scale (in equivalent input)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Communication outputRS-485
Ambient environmentTemperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation)
Power supply100 to 240 V AC ±10%, 50/60 Hz, 20 VA (max)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series



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