Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M

Dissolved Ozone Monitor

A dissolved ozone concentration monitor designed for semiconductor devices,  wet processing for liquid crystal and glass.

Accommodating low-concentration chemical treatment, it is ideal for measuring a wide range of dissolved ozone concentrations, up to a maximum of 500 ppm.


DC24VTransmission OutputContact OutputLow Concentration

Segment: Semiconductor
Produktionsfirma: HORIBA Advanced Techno Co., Ltd.

Abundant Measurement Options

In addition to the standard measurement range of 0-100 mg/L for ozone, it offers three additional measurement ranges.  Suggestions for the optimal range is provided.

Choice of Pipe Sizes

In addition to the standard 3/4 inch, choices can be made from 1/2 inch and 1 inch sizes.

High Reproducibility Accuracy and Stability Accuracy

Reproducibility accuracy within FS +/- 0.2%.

Corresponding detectorZH-10ZH-40ZH-100ZH-500
Measurement range0 - 10.00mg/L0 - 40.00mg/L0 - 100mg/L0 - 500mg/L
Supply temperature                   5 - 30 deg.C5 - 80 deg.C
Chemical contact material of detectorPFA, PTFE, quartz glass
Supply pressureWithin 0.5 MPa
Repeatability+/- 0.2% of full scale
Linearity+/- 1.0% of full scale
Transmission outputNumber of output: 2
Contact outputNumber of output: 5
Contact inputNumber of input: 2
Communication outputRS-485
Power supplyRated voltage 24 +/- 10% V DC, 15W



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