CRITERION™ Series (DZ-100)

Ultra-thin Mass Flow Module DZ-100

The CRITERION™ Series DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the CRITERION™ Series D500. This innovative technology controls the mass flow of various gases with high precision. As with the CRITERION™ Series D500, the user-configurable CRITERION™ Series DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.