HE-960H-TM-S

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

High Precision TMAH Concentration Monitor

A high-precision TMAH concentration monitor ideal for developer solution TMAH concentration management.

Featuring a highly chemical-resistant carbon sensor, allowing the high-precision measurement of TMAH concentration, the main component of photoresist developer solutions.

CONDChemical Concentration

AC(100-240V)Transmission OutputContact OutputSingle Component

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

High precision

Concentration: 0–3%, Conductivity: 0–1000 mS/cm, Repeatability: Capable of TMAH concentration measurements within ±0.003wt%

Automatic switching for display range

Automatic switching of display range from high concentration to low concentration.  Additionally, it is possible to monitor changes while maintaining effective conductivity resolutions.

3 measurements

Capable of three measurements, TMAH concentration, conductivity, and temperature.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between the chemical concentration and conductivity along with temperature characteristics.  It is particularly suited for the dilution management of low-concentration chemicals.

Model name HE-960H-TM-S
Target of measurement TMAH
Measurement range Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm
Repeatability Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
Linearity Within +/- 0.003wt% (Using equivalent input for conductivity)
Transmission output Number of output: 4
Contact output Outputs: 5 points
Communication output RS-485
Power supply 24V DC +/- 10% 10W
Compatible sensor FES-510 Series
Wetted material of sensor GC, PFA, Karletz®

Schematics

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