HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

A hydrofluoric acid concentration monitor that complies with the sanitary standards for semiconductor processes.

Incorporating a sensor with completely PFA (perfluoroalkoxy) wetted parts, size is optimized to the absolute limit. It can also handle wide-range measurements up to 50% HF concentration, matching the sanitary requirements in semiconductor processes.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Wide-range compatible

The auto-ranging feature, from low concentration to high concentration (up to 50% HF concentration), enables optimal measurement performance at each target concentration.

Contamination-free

Employing a sensor with a sanitary structure, using only PFA as the wetted material. Being a chemically resistant sensor, it is capable of measuring various chemicals used in semiconductor processes.

High stability/reproducibility accuracy

It achieves a reproducibility accuracy of ±0.5% FS.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemical solutions.

Specifications of HF-960EM
Model name	HF-960EM
Measurement range	HF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm
Repeatability	+/- 0.5% F.S. (in equivalent input)
Linearity	+/- 0.5% F.S. (in equivalent input)
Transmission output	Number of output: 4
Contact output	Outputs: 5 points
Contact input	Inputs: 2 points
Communication output	RS-485
Power supply	DC 24 V +/- 10% 15W
Compatible sensor	CM-520 Series
Wetted material of sensor	PFA