HF-960H

HF / HCl Concentration Monitor

A concentration monitor for measuring hydrofluoric acid and hydrochloric acid concentrations from low to high levels.

Employing a chemically resistant 4-pole carbon sensor which enables wide-range measurements from low to high concentrations.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Wide-range compatible

Wide-range measurements of HF concentration and HCl concentration in the range of 0.000% to 10.00% are possible with automatic decimal point adjustment.

Sensor with excellent chemical resistance

Employing a chemically resistant 4-pole glass carbon sensor.

Automatic range switching for the display

It automatically switches the display range from high concentration to low concentration. Also, it is possible to monitor changes while maintaining effective conductivity resolution.

Compatible with four types of measurements

Capable of accommodating four types of measurements: HF concentration, HCl concentration, conductivity, and temperature. For HF and HCl, temperature compensation measurements are conducted based on their respective temperature characteristic data. It can also be used as a conductivity meter for other chemicals.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemical solutions.

Model	HF-960H
Measurement range	HF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm
Power supply	24 V DC ±10%, 10 W (max.)
Protective structure	Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass	Approx. 550 g
Conforming standards	CE marking, FCC Part 15
Compatible sensors	FES-510 Series (flow-type carbon sensor)