Semiconductors

Carbon Film

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Nanocarbon material (diamond, graphene, carbon nanotubes and so on) have excellent electrical properties, such as high electron mobility and tolerance to a high current density. They also have high thermal conductivity and mechanical strength, and are therefore promising materials for future electronic devices for a breakthrough. HORIBA contributes its measurement technology for film thickness measurement and defects analysis of nanocarbon materials.
 


Film Thickness and Quality  |  Stress Analysis  |  Elemental Analysis  |  Foreign Object Detection/Analysis

Film Thickness and Quality

In the advancement of thin film technology through miniaturization, we propose solutions for achieving high film deposition control, such as in-situ evaluation during the film deposition process and evaluation of thin films at the Ångström order level.


Membrane information obtained using a spectroscopic ellipsometer

Stress Analysis

We propose a multifaceted stress evaluation solution using a Raman spectrometer boasting high wavenumber and spatial resolution, along with cathodoluminescence (CL).

Elemental Analysis

Foreign Object Detection/Analysis

Defects in wafers can also be caused by foreign matter, and we will introduce a method of microscopic elemental analysis to identify the cause of defects.

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UVISEL Plus
UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

R-CLUE
R-CLUE

Raman Photoluminescence & Cathodoluminescence

H-CLUE
H-CLUE

Versatile Hyperspectral Cathodoluminescence

F-CLUE
F-CLUE

Compact Hyperspectral Cathodoluminescence

i-CLUE
i-CLUE

Fast Imaging Cathodoluminescence

Cathodoluminescence - CLUE Series
Cathodoluminescence - CLUE Series

Cathodoluminescence Solutions for Electron Microscopy

EMGA-Expert
EMGA-Expert

Oxygen/Nitrogen/Hydrogen Analyzer
(Flagship High-Accuracy Model)

EMGA-Pro
EMGA-Pro

Oxygen/Nitrogen Analyzer (Entry Model)

EMIA-Step
EMIA-Step

Carbon/Sulfur Analyzer (Tubular Electric Resistance Heating Furnace Model)

PD10
PD10

Reticle / Mask Particle Detection System