CS-900

CS-900

Non-Contact Chemical Concentration Monitor

The next generation of Wet Process. HORIBA contributes to the optimization of process by providing chemical concentration management equipment that increase yield rate.

In order to fulfil the tight chemical concentration control required in semiconductor WET process, HORIBA realizes higher functionality to meet the needs by designing compact equipment while maintaining stable measurement and carrying out operator safety through its original sensor design.

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Completely non-contact and highly stable

Zero contamination is made possible by directly connecting a sensor externally to the PFA piping. This removes the need for plumbing construction when attaching the sensor, which reduces chemical accidents. In addition, by upgrading the optical system, the equipment has been made more compact while retaining the original specifications of CS-600F*1.

High quality and stable measurement

  • Zero contamination
  • Equipped with temperature compensation to enable stable measurement
  • Equipped with HORIBA original algorithm to compensate influence of air bubbles.
  • Same repeatability and stability with conventional CS-600*1

 

Suppression of vibration effects

  • HORIBA adopts an optical system structure that is strong against misalignment and synergizes with HORIBA original piping construction.

 

Space saving

  • Light source and light detector have been integrated into cell unit.

  • Panel mount display (9.6cm x 9.6cm)

Longer lifespan of light source.

  • Use of LED lamp Increases lifespan (5 years warranty)

Improves work safety

  • Semi-annually BG compensation cycle

  • Piping installation is not required when installing the product, which helps to reduce accidents such as chemical leak.

*1 CS-600 is HORIBA's optical liber type chemical concentration monitor.

Optical design and amplifier without using optical fiber coupled with miniaturization of sensor increase degree of freedom in installation

Direct and stable measurement is made possible for chemical with wide temperature range (20°C to 80°C)

Stability

Measurement Condition
Measurement Frequency: every 3 seconds
Moving Average: 16 times
Temperature: room temperature
Pipe Diameter: 3/4 inch

Initial Sample Concentration
NH3 : 0.95%    H2O2 : 5.15%    H2O: 93.9%

Measurement result
Sample (real liquid) measured for 1 hour shows excellent stability.

Easy installation and removal made possible

Model nameNon-contact type chemical concentration monitor
ModelCS-900
Measurement methodAbsorption spectroscopy
Concentration calculationTemperature compensated multivariate analysis
Measurement range/
Repeatability (mass%)

Model name

ComponentMeasurable rangeRepeatabilityAnalog output range
CS-900-1P-1P25P5NH30.00%-1.20%±0.05%0.00-10.00
H2O20.00%-5.50%±0.10%0.00-10.00
H2O93.3%-100.0%±1.0%

-

CS-900-1P-P8P8

NH30.20%-0.80%±0.03%0.00-1.00
H2O20.20%-0.80%±0.03%0.00-1.00
H2O98.4%-99.6%±0.3%

-

Conditions of measurement

1) Measurement Frequency: every 3 seconds
2) Moving average : 16 times

Tube

PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube)

Sample condition*1

Sample temperture : 20 to 80°C
Sample temperture, Atmospheric temperture fluctuation :
±1 degree C (period of time: 1 hour)
Sample pressure : Less than 0.2 MPa (G)
Sample pressure fluctuation : Within 0.02 MPa

Power source

DC 24V

Power consumption

Apporox. 30W (Transient electric current at the time of start is excluded)
WeightDisplay unit : Apporox. 0.9kg
Sensor unit: Apporox. 2.9kg
Dimension (WxDxH)Display unit : 96x135x96mm
Sensor unit: 238x135x190mm
Slanting angleSensor unit:
Vertical direction within ±3 degree
Lateral direction 0 to 90 degree
Light source5years
communicationParallel I/O, RS-232C, Analog output

 

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

More CS-100 Series

Stand-alone Type Chemical Concentration Monitor

More CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

More CS-600F

Fiber Optic Type Chemical Concentration Monitor

More CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

More CS-700

High Precision, High Stability Chemical Concentration Monitor

More HD-960L

Dissolved Oxygen Monitor in Low Concentration

More HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

More HE-200C

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For Low-concentration)

More HE-300C

Field-installation Type Electric Conductivity Meter (Two-Wire Transmission, For Low-concentration)

More HE-300R

Field-installation Type Electric Resistivity Meter (Two-Wire Transmission)

More HE-480C

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

More HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

More HE-480R

Panel-mount Type Resistivity Meter(Four-Wire Transmission)

More HE-480R(W)

Industrial resistivity meter

More HE-960CA

Citric Acid Monitor

More HE-960H-TM

Wide range TMAH Concentration Monitor

More HE-960H-TM-S

High Precision TMAH Concentration Monitor

More HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

More HE-960LC

Carbon Sensor Conductivity Meter

More HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

More HE-960R-GC(W)

Carbon Sensor Resistivity Meter

More HE-960RW-GC(W)

2-Channel Resistivity Meter

More HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

More HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

More HF-960H

HF / HCl Concentration Monitor

More HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

More HF-SP-CU

2-channel High Precision HF Concentration Monitor

More HP-480(W)

Industrial pH meter

More HZ-960

Dissolved Ozone Monitor

More SLIA-300

Highly Sensitive Silica Monitor

More UP-100

Micro Volume pH Monitor

More CS-100 Series

Stand-alone Type Chemical Concentration Monitor

More CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

More CS-600F

Fiber Optic Type Chemical Concentration Monitor

More CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

More CS-700

High Precision, High Stability Chemical Concentration Monitor

More EG-100

Washwater Monitoring System

More HC-200F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Four-Wire Transmission)

More HC-200NH

Field-installation Type Ammonia Nitrogen Meter(Four-Wire Transmission)

More HC-300F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Two-Wire Transmission)

More HD-200

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

More HD-200FL

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Optical Type)

More HD-300

Field-installation Type Dissolved Oxygen Meter(Two-Wire Transmission, Membrane Type)

More HD-480

Panel-mount Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

More HD-960L

Dissolved Oxygen Monitor in Low Concentration

More HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

More HE-200C

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For Low-concentration)

More HE-200H

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For High-concentration)

More HE-200R

Field-installation Type Electric Resistivity Meter (Four-Wire Transmission)

More HE-300C

Field-installation Type Electric Conductivity Meter (Two-Wire Transmission, For Low-concentration)

More HE-300R

Field-installation Type Electric Resistivity Meter (Two-Wire Transmission)

More HE-480C

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

More HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

More HE-480H

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

More HE-480R

Panel-mount Type Resistivity Meter(Four-Wire Transmission)

More HE-480R(W)

Industrial resistivity meter

More HE-960CA

Citric Acid Monitor

More HE-960CW

Panel-mount Type Conductivity Meter (Four-Wire Transmission, 2-channel)

More HE-960H-TM

Wide range TMAH Concentration Monitor

More HE-960H-TM-S

High Precision TMAH Concentration Monitor

More HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

More HE-960HI

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Wide Range)

More HE-960LC

Carbon Sensor Conductivity Meter

More CS-100 Series

Stand-alone Type Chemical Concentration Monitor

More CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

More CS-600F

Fiber Optic Type Chemical Concentration Monitor

More CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

More CS-700

High Precision, High Stability Chemical Concentration Monitor

More EG-100

Washwater Monitoring System

More HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

More HU-200SS

Field-installation Type MLSS Meter (Four-Wire Transmission)

More HU-200TB-H

Field-installation Type Turbidity Meter (Four-Wire Transmission, High-sensitivity)

More HU-200TB-IM

Field-installation Type Turbidity Meter (Four-Wire Transmission, Immersion Type)

More HU-200TB-W

Field-installation Type Turbidity Meter (Four-Wire Transmission, For Wide Range)

More HZ-960

Dissolved Ozone Monitor

More OPSA-150

Organic Pollutant Monitor

More TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

More U-50

Multi-parameter Water Quality Checker

Corporate