SLIA-300

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

A proven track record in silica analysis of ultra-pure water!
Compact/highly sensitive new performance.

Concentration of silica in ultra-pure water has a significant impact on product precision and yield in semiconductor/FPD processes. Reliably meeting measurement requirements of 1μg/L (1ppb). High-sensitivity measurements across the entire measurement range in a compact desktop body design have been achieved. With excellent basic performance and high sensitivity, including high-speed responsiveness and self-diagnostic capabilities, it strongly supports the ultra-pure water processes in semiconductor/FPD manufacturing.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

High sensitivity with excellent repeatability
A unique newly developed cell realizes high sensitivity corresponding to low concentrations. Quick 5-minute measurements guarantee repeatability of ±2% of full scale in the 0 to 2 μg/L range.

Compact desktop design
A newly developed cell realizes a revolutionary compact design. This desktop design can be used in a variety of installation conditions, including small spaces. It is also possible to be used as a portable device.

Reagent consumption is reduced to 1/5
Adopting an improved reaction cell, the consumption of reagents has been reduced to 1/5 of conventional reagents. Running costs for reagents can be significantly reduced.

Capable of measuring up to 6 points (optional)
1 to 6 points of measurement can be freely set. A single unit can be used to support multipoint measurements.

Self-diagnostic function to monitor operational abnormalities
Self-diagnostic function detects abnormalities in operations such as sample and reagent injection, calibration errors, cell temperature monitoring, and abnormality in light source. In case of errors, a message is sent using an alarm indication lamp as well as text display to notify the user.

A maintenance-free, long-lasting light source that does not require replacement has been adopted
A monochromatic semiconductor light source with stable light intensity and long life is in use. It can be used as a semi-permanent light source.

Model	SLIA-300
Measurement method	Molybdic blue absorptiometry
Measurement range	0 to 2 / 0 to 20 µg/L, or 0 to 5 / 0 to 50 µg/L (please specify when placing an order)
Measurement time	5 minutes
Measurement points	1 to 6 points (please specify when placing an order)
Reproducibility	±2% of full scale
Calibration function	Standard fluid calibration
Compensation function	Blank compensation Metage line compensation (Specific to each line)
Reagent used	· Reagent A: sulfuric acid + ammonium molybdate · Reagent B: oxalic acid · Reagent C: L (+) - ascorbic acid
Reagent replacement interval	One week (according to the recommended period of our company)
Power	100 to 240 V AC 50/60 Hz
Max. power consumption	Approx. 600 VA
Installation condition	Indoor, Ambient temperature 10 to 35°C, Humidity 85% or lower
Sample water condition	· Water temperature: 15 to 35°C · Supplied flow rate: 250 to 300 mL/min (must be adjustable) · Pressure: 0.1 to 0.5 MPa
Outside dimensions	580 (W) x 375 (H) x 500 (D) mm
Weight	One-point measurement: approx. 41 kg (plus 1 kg for an additional measurement point)
External I/O	Density output	4 to 20 mA DC / 0 to 16 mA DC / 0 to 1 V DC (to be specified at order)
	Contact output	· Common to all lines: During measurement, synchronous signals, alarms (batch), heaters, power off, calibration signals 1 and 2, density upper limit warning, or sample water off. · Specific to each line: Measurement range, density upper limit warning, or sample water off (the density limit warning or the sample water off batch or respective line alarm should be specified when placing an order. The alarm contents should be also selected when placing the order.)
	Contact input	· Common to all lines:Calibration start, measurement start, cost-efficient operation, line selection, measurement low range, measurement high range
	Serial I/O	RS-232C
Option	Sample water heating unit, standard fluid supply unit, reagent blending tools