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Cathodoluminescence (CL) is a nondestructive technique based on the emission of light from a material upon excitation by a high energy electron beam (or “cathode ray”). The CL detector fitted in a SEM microscope can be used as a powerful tool to characterize semiconducting materials in growth and device process development and probe:

  • Optical and Electronic properties
  • Trace elements/dopants
  • Band Gap
  • Crystal structure
  • Impurities
  • Presence and type of defects
  • Variation in composition
  • Carrier dynamics
  • Changes in elastic strain
  • Depth-resolved information

HORIBA offers CL one port-interface solutions that are compatible with all commercial SEM and FIB systems. With its wide emission energy ranging from 0.5 to 6 eV, its Raman capability, and its spatial resolution ranging from µ to nano, the Horiba CLUE systems can analyze a broad panel of semiconducting materials: group IV, II-VI, III-Vs, III-nitrides, wide band gap (SiC), 2D materials, Quantum dots, Nanowires as well as devices for optoelectronics, photovoltaics, LEDs.

CompatibilityAll SEMsAll SEMsAll SEMs
CollectionMotorized Paraboloid mirror with fully retractable mechanism
AutomationFully automated
Signal collectionImagingCL, Spectral & Hyperspectral CL, Time-resolved CLImaging CL, Spectral & Hyperspectral CL, Time-resolved CL, Angular-resolved CLRaman, PL, CL

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