Spectroscopic ellipsometry is a surface sensitive, non-destructive, and non-intrusive optical metrology technique widely used in the semiconductor industry to determine:
For over 25 years, HORIBA has provided a wide range of spectroscopic ellipsometers with unique features. They are used to determine with a great accuracy the film thickness and optical properties of Oxides, Nitrides, Thin Conductive oxide, compound and organic semiconductors and many other materials.
|Spectral range||400-850nm||190 nm-2200nm|
|Spot size||8 spots automatically selectable||3 spots manually selectable|
|Angle of incidence||Fixed||Variable|
|Sample size||8”||Up to 12” depending on the options|
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