APNA-370/CU-2 [High Sensitivity Model]

Ammonia Monitor

The APNA-370 with CU-2 High Sensitivity Model is a gas analyzer designed for high sensitivity continuous monitoring of ammonia (NH3) concentration, even at extremely low parts per billion levels. APNA-370 with CU-2 adopts an oxidation catalyst to convert ammonia into nitrogen oxides and chemiluminescence detection (CLD) method to quantify the increased nitrogen oxides (NOx) concentration after catalytic oxidation. By employing the dual cross-modulation CLD method, analyzer uses one cell and one detector and alternating the introduction of sample gas and reference gas at regular intervals. Such design contributes to the long-term stability and minimal zero drift, enabling reliable measurement and high sensitivity with the Lower Detection Limit 1 ppb. Continous monitoring of amines is also possible by a separate unit incorporated with an optional special scrubber.
APNA-370 with CU-2 High Sensitivity Model is used for monitoring airborn molecular contamination in cleanrooms, as well as for monitoring ambient air quality and other applications that require monitoring of ammonia in parts per billion (ppb) concentrations.


  • Ambient air quality monitoring
  • Airborne molecular contamination (AMC) monitoring in cleanrooms


Division: Ambient
Manufacturing Company: HORIBA, Ltd.
Base product: AP-370 series
  • High sensitivity and high stability
    HORIBA's original cross-modulation CLD method ensures long-term stability and high reliability of measurement data
    A unique design of the detector and optical system realizes high sensitivity of measurement
  • Automatic calibration function
    Function is available when APNA-370 (High sensitivity model) is connected with standard gas generator SGGU-610
  • Data communication
    Remote operation is available by LAN connection terminal (option), RS-232C (option)
  • No adsorption solution or reagents required
  • No human errors due to fully automated measurement
  • Specially treated sampling system
    Special treatment for less chemical volatilization inside sampling tube to enable high precision of measurement  


Related Industries


Related Application

ComponentAmmonia*1 / Nitrogen Oxides
ModelAPNA-370/CU-2 (High sensitivity model)
PrincipleCross Modulation Chemiluminescence
Detection method + Oxidation catalyst
Range0 - 100 / 200 / 500 / 1000 ppb
Lower detection limit (LDL)
*Typical value under certain conditions
1 ppb
Response time (T90)Within 5 minutes from CU-2 sample inlet
Displayed componentsInstantaneous value of NH3 / NOx
Analog output4 - 20 mA DC or 0 - 1 V DC
Communication interfaceRS-232C or TCP/IP
Sample gas flowApprox. 2.0 L/min
Operation gasN/A
Calibration gasDilute N2 based NO gas with SGGU-610
Ambient temperatureEquivalent to cleanroom temperature
Ambient humidityEquivalent to cleanroom humidity
PowerAC100 - 120 V, AC 200 - 240 V
(analyzer & calibration equipment)
APNA-370/CU-2 (High sensitivity model)
SGGU-610 (with special NH3 scrubber for zero gas)

*1: Ammonia with amine included
・CU-2: converter, SGGU-610: standard gas generator


Monitoring of Airborne Molecular Contamination in Clean Room of Electronics Industry
Monitoring of Airborne Molecular Contamination in Clean Room of Electronics Industry
Monitoring of Ammonia Airborne Molecular Contamination in Semiconductor Fabrication
Monitoring of Ammonia Airborne Molecular Contamination in Semiconductor Fabrication

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