An ISO 17025-accredited calibration and repair facility for the Semiconductor Mass Flow Controller (MFC) is set up at HITC Pune. At present, the calibration and repair for MFC model no. S600 and S48 are carried out to enhance their life and recalibrate.

Calibration Setup: is done inside a clean room. A nitrogen gas with a purity level of 99.9995% is used. The calibration test conducted includes electrical testing, MFC zero conditioning, Inner leak check and Flow response check with report generation.

The calibration facility is designed for completed MFC controller product line (E/N/Z series).

Repair Setup: This facility also houses a fully-fledged service and the repair facility for the S600 & S48 series of Mass Flow Controllers. A He gas of 99.99% purity is used for Helium leak check of MFC’s.

The instruments and benches used at this facility are calibrated every year in the HORIBA the Fukuchiyama technology center in Japan, which has obtained accreditation from the National Voluntary Laboratory Accreditation Program of the National Institute of  Standards and Technology, USA. (NVLAP Lab Code 600160-0). The assembly bench fulfills the requirement of ISO-5 (Class 100) type used during the MFC parts replacements.

The facility has factory-trained service manpower guided by the locally stationed Japanese experts from HORIBA Ltd.