CS-620F

광섬유형 고온 인산 농도 모니터

키워드: 3D NAND, SiN(Silicon Nitride), Etching, Hot phosphoric acid

3D NAND 제조 공정에서는 수십 개의 SiO₂ 및 SiN 층이 증착되고 SiN 층은 고온 인산을 사용하여 선택적으로 제거됩니다. 이 과정에서 약액의 농도와 온도를 조절하여 원하는 식각율을 얻을 수 있습니다. 기존 제품은 고온의 약품을 측정하기 어려웠지만 CS-620F는 170도까지 고온에서 측정이 가능합니다. 연속 측정은 흡수 분광법을 사용하여 이루어지며, 다른 방법에 비해 유지 관리가 덜 필요하고 소모품 소모가 적습니다.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Key features

High concentration phosphoric acid up to 92% can be measured

No cooling mechanism and cooling time is needed.
Direct measurement is possible without cooling high-temperature phosphoric acid (140 to 170°C) in the circulation line.

PFA is used in the sample wetted area to reduce contamination risk.

Contributes to significant reduction in equipment downtime by adopting semi-annual background correction cycles.

Contributes to faster concentration feedback control by updating measured data every 3 seconds

Stability

▶ Measurement results
The sample (actual solution) measured for 1 hour shows exellent stability.

▶ Measurement conditions
Measurement Cycle: every 3 seconds Measurement time: 1 hour Moving average: 16 times
Sample concentration (Initial Sample Concentration) H₃PO₄: 92.2% H₂O: 7.8% Sample temperature: 141°c

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Product name	CHEMICAL SOLUTION MONITOR
Model	CS-620F
Measurement principle	Absorption spectroscopic method
Calculation principle	Temperature compensation type multivariate analysis
Sample	H₃PO₄/H₂O
Measurable range Repeatability		Component	Measurable range (mass%)	Repeatability (mass%)	Analog output range(mass%)
	1st solution	H₃PO₄	85.00-92.00	+/-0.10	85.00-100.00
	1st solution	H₂O	8.0-15.0	+/-0.3	0.0-15.0
	・ Repeatability is defined by maximum error from average (1 hour). ・ In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical, there is possibility of discrepancy (Maximum +/- 0.30%).
Conditions of Measurement	1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times
Connection fitting size	1 inch or 3/4 inch
Sample condition	Sample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min
Air(for operation and purge)	Connection port: 4 mm O.D. quick joint Pressure: 0.2 MPa ± 0.02 MPa
Power source	100 to 230 V AC (Single-Phase), 50/60 Hz
Power consumption	Approx.85 VA (Transient electric current at the time of the start is excluded)
Communication	Parallel I/O, RS-232C, Analog output
Dimension	(Monitor) 200 (W) × 308 (D) × 78 (H) mm (Lamp unit) 200 (W) × 262 (D) × 100 (H) mm (Sample cell) 240 (W) × 209 (D) × 205 (H) mm
Weight	(Monitor) Approx.3.6 kg (Lamp unit) Approx.2.8 kg (Sample cell) Approx.3.0 kg
Ambient temperature	(Monitor, Lamp unit) 20 to 30°C (Optical fiber, Sample cell) 20 to 100°C * Sudden temperature change should be avoided, within +/- 1°C/1hour
Ambient humidity	(Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)
Slanting angle of installation	(Monitor, Lamp unit) Within +/-1 degree (Sample cell) Please install so that air bubbles do not stay up.
Optical fiber	Length: 5 m, Bend radius: R150 mm