1.61
MB
Readout47_Industrial_In-line_and_Multi_Component_Monitor_Using_Absorption_Spectroscopy_and_Its_Application
CS-700
High Precision, High Stability Chemical Concentration Monitor
The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
By improving HORIBA's renowned spectroscopic measurement technology, the CS-700 realizes up to 5X improvement in measurement performance.
Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
Suitable for controlling individual constituents of commercial chemistries.
- Monitoring max 8 components with real time and high performance
- No reagents required and zero sample consumption for reduced CoO (Cost of Ownership)
- Simple Plug and Play installation
Measurement Range and Repeatability
Unit : mass%
| Component | Measurable range | Repeatability | |
|---|---|---|---|
| 1st solution | HNO3 | 30.0 - 34.0 | ±0.5 |
| HF | 2.00 - 4.00 | ±0.10 | |
| H3PO4 | 35.0 - 39.0 | ±0.6 | |
| H2SiF6 | 0.00 - 3.00 | ±0.50 | |
| H2O | 25.0 - 33.0 | ±1.0 |
Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C
- Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
- The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)
Specifications Comparison with Previous Model
| item | CS-100 | CS-700 |
|---|---|---|
| Measurement principle | Absorption spectroscopic method | Absorption spectroscopic method |
| Sample temperature | 20 to 30 Degree C | 20 to 30 Degree C |
| Ambient temperature | 20 to 25 Degree C | 20 to 30 Degree C |
| Components | Max. 4 components | Max. 8 components |
| Chemical range | Max. 4 ranges | Max. 6 ranges |
| Communication | Parallel I/O, Analog output, RS-232C | Parallel I/O, Analog output, RS-232C |
| Analog output (4-20 mA) | Max. 2 components | Max. 6 components |
| Dimension | 205(W) X 329(D) X 269(H)mm | 218(W) X 391(D) X 213(H)mm |
| Power source | DC 24V | DC 24V(Same connecter of CS-100) |
| Consumable parts | Halogen lamp | Halogen lamp (Same as CS-100 type) |
| Wavelength | UV/NIR | UV/NIR |
| Wetted material | PTFE, PFA, Sapphire or Quartz, | PTFE, PFA, Sapphire, Kalrez 4079 O-ring |
Schematics
