Citric Acid Monitor HE-960CA


High precision, wide-range citric acid monitor having chemical resistance sensor. Measurement range : 0 - 2%.


  • Wide range measurement
        Concentration: 0 - 2%, Conductivity: 0 - 10 mS/cm
  • High precision
  • PFA Sensor

Manufactured by HORIBA Advanced Techno


Model name


Target of measurement

Citric acid

Measurement range

Concentration: 0 -2%, Conductivity: 0 - 10mS/cm


2000 ppm range: within +/- 1%R.D. or +/- 5 ppm whichever greater

2.000% range: within +/- 1%R.D. or +/- 0.005% whichever greater


+/- 0.5% of F.S. (in equivalent input)

Transmission output

Number of output: 3

Contact output

Outputs: 5 points

Communication output


Power supply

24V DC +/- 10% 10W

Compatible sensor

FS-07F Series

Wetted material of sensor

GC, PFA, Karletz


Dimensions of HE-960CA


  • Technical Article

Conductivity Meter with Carbon Electrodes and Application for Densitometers Technologies for a Practical Densitometer (1.8MB)

"2-pole electrical conductivity sensors with chemical resistant carbon electrodes are developed in 2002. These sensors are installed in the semiconductor wet process and used as a densitometer practically. The electrical circuit for 4-pole measurement was an innovation which improved the interface problem to the any 4-pole sensors. Single component concentration of HF or TMAH is measured from the conductivity, based on the precise measurement of conductivity and temperature, via individual temperature compensation of conductivity. Etching or developing solution should be controlled severely. Needs for monitoring solution based on the application of conductivity method are increased."