Monitoring of Airborne Molecular Contamination in Clean Room of Electronics Industry

• Manual analysis takes costs, skill and time
• Want to know the appropriate time for replacing the chemical filter
• Die corrosion of electronic devices
• Foggy mirror lens of manufacturing equipment
• Oxidize film's breakthrough voltage degradation
• Etching error
• Thin film abnormal growth

HORIBA's AMC monitoring system supports the monitoring of contamination concentration trends and chemical filter maintenance through automated measurement as well as complements conventional measurement based on manual analysis, thus contributing to solving customers' issues. Through combined measurement of the outdoor atmosphere, we can offer more comprehensive measurement solutions with this system.

Features

• Stable automatic and continuous measurement
  Estimate the causes of defects in products/peripheral equipment and when to replace the chemical filters by monitoring trends
• Easy operation
  Special skills are not required. Reduce management costs, time and labor costs
• Build up a system according to request
  Multi-point measurement with line selector and portable trolley type (option). Support not only measurement in cleanrooms but also outside air measurement.

• Measurement of airborne molecular contamination (AMC) inside a clean room or in ventilation air
• Focused measurement at a spot such as the periphery of certain equipment
• Detects specific events, such as an elevation in nitrogen oxide concentration due to increased traffic (outdoor atmosphere).