SEC-N100 Series

Digital Mass Flow Controller SEC-N100 Series

Digital Mass Flow Controller

The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its' cost reduction capabilities in your process.

*1 Excluding SEC-N17X Series.

View our MFC comparison chart here.

Segment: Semiconductor
Abteilung: Fluid Control
Produktionsfirma: HORIBA STEC, Co., Ltd.
  • Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM
  • Wide variety of communications and power supply
  • High S.P. accuracy:  +/- 1.0% S.P. (*1)
  • 1 second high speed response (*1)
  • Multi-gas, multi-range solution
 
The multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.

        

 

ModelsSelect communication modeSelect power supply
SEC-N102 series

Digital communication

▶RS485 F-NET Protocol

Analog communication

▶0〜5VDC

±15VDC(±5%)

HORIBA'S lineup includes leased power supply PE series.

SEC-N104 seriesDeviceNet™ communicationConforming to ODVA standards
SEC-N105 series

CC-Link® communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to  CC-Link® standards 24VDC (13 to 32VDC)
SEC-N106 series

PROFIBUS™ communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to PROFIBUS™ standards 24VDC(13 to 32VDC)
SEC-N107

EtherCAT® communication

Conforming to EtherCAT®  standards 24VDC

*1 Excluding SEC-N17X Series

 

External Dimension

 

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Plasma Emission Control and Process Gas Monitoring for Dry Coating Process in Functional Glass Manufacturing
Plasma Emission Control and Process Gas Monitoring for Dry Coating Process in Functional Glass Manufacturing
HORIBA is one of the world's largest gas and liquid mass flow controller manufacturers, with a range of analogue, digital and high temperature mass flow controllers along with the point of use liquid source vaporization control and delivery systems.
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories

Informationsanfrage

Sie haben Fragen oder Wünsche? Nutzen Sie dieses Formular, um mit unseren Spezialisten in Kontakt zu treten.

* Diese Felder sind Pflichtfelder.

Related products

EC-5000 Series
EC-5000 Series

Exhaust Pressure Controller

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

Micropole System QL Series
Micropole System QL Series

Quadrupole Mass Analyzer

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PV Series
PV Series

Piezo Actuator Valve

RU-1000
RU-1000

Plasma Emission Controller

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

UR-Z700 Series
UR-Z700 Series

Digital Automatic Pressure Regulator

VC Series
VC Series

Direct Liquid Injection System

VG-200S
VG-200S

Capacitance Manometer

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

ASGU-370P
ASGU-370P

Mehrpunktkalibrator (paralleler Betrieb)

ASGU-370S
ASGU-370S

Mehrpunktkalibrator (serieller Betrieb)

ASGU-370TS
ASGU-370TS

Mehrpunktkalibrator für Qualitätsprüfung im Feldbetrieb

ASGU-370TS SPLIT
ASGU-370TS SPLIT

Mehrpunktkalibrator für Qualitätsprüfung im Feldbetrieb

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

FS-3000
FS-3000

Thermal Flow Splitter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

Corporate