The concentration monitoring of chemical solutions play an advanced role as a vital part of the "Monitor → Feedback → Control" process control in accordance to the evolution of semiconductor processes. HORIBA has a wide product lineup of chemical concentration monitors specialized for chemical concentration management from FEOL to BEOL in order to fulfil the clients’ needs.
Non-Contact Chemical Concentration Monitor
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
High Precision, High Stability Chemical Concentration Monitor
Fiber Optic Type Chemical Concentration Monitor
Stand-alone Type Chemical Concentration Monitor
Fiber Optic Type Chemical Solution Concentration Monitor