Quantitative Analysis of Carbon in Polysilicon

Polysilicon, the raw material for silicon wafers, requires strict control of carbon content, which affects its conductivity. As higher purity silicon wafers are required, it is important to understand the amount of carbon contained in polysilicon supplied as a material. However, some carbon is present as carbonate and some is attached as CO₂, making it very difficult to distinguish between them and analyze the extremely small amount of carbon.