nanoGPS OxyO Encoder

Key features

• Snapshot determination of 3 absolute coordinates
• Repositioning accuracy in the nm range (x, y) and 10 μrad (θ)
• Easier to deploy and cheaper than a laser interferometer system
• USB 3 connection, absolute position is obtained directly on PC; no need for converters, no hassle with formats
• Position reading flexibility: performed at stand-off distance (from 3 mm up to 100 cm depending on design)
• Reference frame with the camera and a patterned substrate as a target provide great enginering implementation flexibility (without the usual restrictions of linear and rotary encoders)
• Can be easily installed/disinstalled, i.e. for verification or calibration operations
• Can be used as an upgrade or retrofit of existing stage assemblies
• In the case of a planar stage + rotation stage assemblies: cheaper and more accurate than conventional optical scale solutions
• Coded zone: ranging from 3 mm x 3 mm to 300 mm x 300 mm or more

Typical use cases

• Provides reliable overnight automation (repositioning accuracy less than 10nm)
• Precise positioning and orientation of an object placed on x,y,θ stage assembly, in vacuum (observed through a window, at 20mm standoff distance)
• When moving a part between 2 machines, allows precise repositioning of the part in each machine
• Retrofit of a manual + piezo stage assembly with a long range position sensor
• All actors of position sensors value chain (end-users, integrators, distributors, but also manufacturers of position sensors looking for addition to their catalogue)
• Individual users in industry or academia

Scientific publications

• Pisani, M. et al. Characterization of Angle Accuracy and Precision of 3-Degree-of-Freedom Absolute Encoder Based on NanoGPS OxyO Technology. Sensors 20, 3462 (2020).