OES-Star UV-VIS-NIR Spectrometer
OES-Star UV-VIS-NIR Spectrometer Spectral Coverage
OES-Star UV-VIS-NIR Spectrometer Quantum Efficiency

UV-VIS-NIR Spectrometer

Horiba’s OEM division, a major supplier of OES solutions, has developed a high end OES Spectrometer with a proprietary optical configuration for broad coverage (185-1050 nm) and high resolution. The OES-Star is available with a selection of three UV-VIS-NIR Back-Illuminated (B.I.) sensors, one TE-Cooled and two uncooled CCD detectors. This unique OES system features an optical design that provides a high peak symmetry across a very broad spectral range combined with high spectral resolution better than 1 nm, at an unmatched aperture of F/2.3.

For OEM Industrial Applications

  • Optical Emission Spectrometry
  • Reflectometry
  • Process and Quality Control
  • Examples:
    • Endpoint Detection
    • Plasma Monitoring
    • Semiconductor Wafer Inspection


*Available in select countries.

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

Segment: Scientific
Výrobní společnost: HORIBA Scientific
  • Optical emission spectrometry (OES)
  • Unmatched long term stability and excellent wavelength accuracy
  • USB2 Ethernet and EtherCAT interface
  • High spectral resolution combined with high throughput
  • Broad wavelength coverage from UV to NIR 
  • Multiple B.I. CCD options cooled/uncooled with high dynamic range 
  • CMOS sensor option with electronic shutter and ultra high spectral rate


Flat resolution and dispersion across the entire spectral range (185 -1050 nm) combined with excellent peak symmetry

This OES-Star is featuring a tall CCD with built in round-to-line (RTL) fiber converter to maximize light collection and therefore the system throughput. Input fiber with a core of 1 mm or smaller can be used. However to take advantage of the tall detector and RTL, larger core fibers are recommended.


Built-in round-to-line (RTL) converter boosts throughput when combined with a large core diameter fiber and our tall CCD (S13241-1108S)


Quantum Efficiency Plot


OEM Spectrometer Selection Guide

View and Download our OEM Spectrometer Selection Guide

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733



General Spectrometer Specifications*

Spectral Coverage

185 – 1050 nm (2048 horizontal pixel format with 14 µm pixel size)
200 – 1050 nm (2048 horizontal pixel format with 12 µm pixel size)

Spectrometer Input

SMA (standard), other input types available upon request

Spectral Resolution

<1 nm with 22 µm slit with very high symmetry across broad spectral range
(flexible based on customer’s need)

Average Spectral Dispersion

34.6 nm/mm, 0.484 nm/pixel (14 µm pixel size), 0.41 nm/pixel (12 µm pixel size)

Focal Length

116 mm



Wavelength Accuracy

< +/- 0.1 nm

Stray Light

< 0.1%*


LabVIEW™ acquisition software for initial evaluation (DLLs provided for software integration)

CCD Detector ModelCooled BI High-end CCD
with best dynamic range
BI CCD Middle Grade
BI CCD cost effective
CCD Sensor Format2048 x 2562048 x 1922048 x 70
CCD Pixel Size12 x 12 μm14 x 14 μm14 x 14 μm
Image Size24.5 x 3.0 mm28.6 x 2.68 mm28.7 x 1.0 mm
CCD QE at 20°C90% or higher at the peakHigh sensitivity over a
wide spectral range
> 75% for 450 - 750 nm
Deep Thermoelectric Cooling-5º CNon-cooledNon-cooled
Full Well Capacity500,000 e¯/pixel (typical)200,000 e¯/pixel (typical)>200,000 e¯/pixel (typical)
>175,000 e¯/pixel (minimum)
Readout Noise50 e¯ (typical)
(@ 1.5MHz sampling)
40 e¯ (typical)
50 e¯ (maximum)
35 e¯ (typical)
45 e¯ (maximum)
Digitization16-bit ADC16-bit ADC16-bit ADC
Dynamic range (FW/RN)10000:15000:15700:1
(measured on each system)
<1.8% (maximum) at low gain
<0.9% (maximum) at high gain
<0.1% (corrected)<0.1% (corrected)
Dark Current1.5 e-/pixel/s (typical) @-5° C
15 e¯/pixel/s (maximum)
50 e¯/pixel/s (typical) @ 20° C
500 e¯/pixel/s (maximum)
50 e¯/pixel/s (typical) @ 20° C
500 e¯/pixel/s (maximum)
Environmental ConditionsOperating temperature 0° C to 40° C ambient
Relative humidity <70% (non-condensing)
Storage temperature -20° C to 50° C
Power Requirements
AC/DC Power Supply (provided)
90-264 VAC, 47–63 Hz


*Specifications, form factor, and spectrometer cover subject to change without notice. No LabVIEW™ license is needed to run our acquisition software.

Mechanical Drawings

Download Mechanical Drawings

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

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