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Products

Mass Flow Controller and Module

Liquid Source Vaporizer

Pressure Controller

Gas Monitoring & Analyzer

Vacuum Gauge

Fully Automated Thin Film Inspection System

Particle Detection System

Plasma Monitor and Controller

Chemical Concentration Monitor

Non-contact Infrared Thermometer

Particle Characterization Analyzer

Surface Analysis Spectrometer

Thin Film Analysis System

Defect / Impurity Monitoring System

Emission Analysis Spectrometer

AMC Monitoring System

Factory Emission Gas Analyzer

Liquid Auto Refill System

Plant Wastewater Measurement Products

Ultrapure Water Measurement Products

Mixer application system

Open Source Software

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