Applikations Berichte

The comprehensive range of in-situ process control systems allows accurate and reliable real-time control of your process. Applications include:

In Situ Process Control: Photomasks Etching

Accurate Depth Targeting for High Aspect Ratio Deep Trench Etches

Low Open Area Logic 130 nm Contact Etch Endpoint

Advanced Process Control Increases Yield of Low Open Area Via Etches