CRITERION D500

Pressure Insensitive Mass Flow Module D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

View our MFC comparison chart here.

 

 

Segment: Semiconductor
Abteilung: Fluid Control
Produktionsfirma: HORIBA STEC, Co., Ltd.
  • Pressure Insensitive Performance
    A new high-performance Pressure Insensitive function provides a simplified gas supply system
  • Multi-range, multi-gas, multi-pressure solution
    The new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range
  • G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function
    The advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput
  • High Accuracy
    Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment
  • Fast Response
    Response: < 0.8 second
    Accurate, stable flow control can be achieved 
  • Dynamic Range
    Wide control range: 0.2% F.S. to 100% F.S.

 

Technical Article

Pressure-Based Mass Flow Control Module CRITERION D507 Series (1.7MB)

Abstract
"Recently, with the increase of application of a semiconductor device according to IoT, the latest semiconductor factories are focusing to minimize the downtime of the apparatus. Therefore, for the purpose of failure pre-detection of semiconductor tools and its components, the managed parameters of semiconductor process are increased, and its specification is getting tighter. In order to satisfy the required control criteria, the mass flow control module is required to have high-speed communication and failure pre-detecting function as well as flow rate accuracy and reproducibility, inlet pressure insensitivity performance. D507 series is lined up on D500 series to meet strict management at recent semiconductor factory."

 

Informationsanfrage

Sie haben Fragen oder Wünsche? Nutzen Sie dieses Formular, um mit unseren Spezialisten in Kontakt zu treten. * Diese Felder sind Pflichtfelder.

Produktaccessoires

Related products

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

LU-4000 Series
LU-4000 Series

POCl3 Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Flow Meter

SEC-400 Series
SEC-400 Series

Mass Flow Controller

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Flow Meter

VG-200S
VG-200S

Capacitance Manometer

Corporate