SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

The SEC-Z700S Series is equipped with new developed thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems.

A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations.

The SEC-Z700S Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided.

Segment: Semiconductor
Abteilung: Fluid Control
Produktionsfirma: HORIBA STEC, Co., Ltd.

Basic Features

  • Multi Gas / Multi Range function. The gas type and full scale flow rate can be changed by the customer
  • Stable control of the gas flow without effect by upstream and downstream pressure fluctuations
  • On board Multi display
  • Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment (standard)
  • Compact size Same fitting to fitting dimension up to 50 SLM
  • Signal compatibility: EtherCAT, DeviceNet Model

 

Key Features

  • Warranty 1% Set Point high accuracy (Flow rate ≥5%)
  • High repeatability (≤±0.15% Set Point/Flow rate ≥5%)
  • Wide range control (0.5-100% Full Scale)
  • Tunable response (300ms≦t≦1000ms)
  • High operation temperature (15-60℃)
  • Low seat leak performance (≤0.1% Full Scale/Bin#01-#06)
  • High corrosion resistance design
ModelSEC-Z714SMG *10 / SEC-Z717SMG *11SEC-Z724SMG *10 / SEC-Z727SMG *11
Full-scale flow rate
(N2 conversion flow rate)
MR.MG number
#01 : 30 SCCM

MR.MG number
#02 : 100 SCCM

#03 : 300 SCCM
#04 : 1 SLM #05 : 3 SLM

MR.MG number
#06 : 10 SLM
MR.MG number
#07 : 30 SLM
#08 : 50 SLM
Flow rate accuracy *1 *2≤± 1.0 %S.P. (Flow rate ≥ 5 %) ≤± 0.05 %F.S. (Flow rate < 5 %)
Linearity *1≤± 0.5 %F.S.
Repeatability *1 *3≤± 0.15 %S.P. (Flow rate ≥ 5 %) ≤± 0.0075 % F.S. (Flow rate < 5 %)
Zero point temperature effect≤± 0.01 %F.S./℃
Span temperature effect≤± 0.05 %F.S./℃
Zero point output stability *4≤± 0.3 %F.S./year
Flow rate control range0.5-100 %F.S. Auto close function : ≤ 0.25 %F.S.
Step-up flow response time *5450 ± 30 ms (0 %F.S. → 5 %F.S. < T ≤ 100 %F.S.) ≤ 600 ms (0 %F.S. → 2 %F.S. < T ≤ 5 %F.S.) ≤ 1 s (0 %F.S. → 0.5 → F.S. < T < 2 → F.S.)
Step down flow response time *5450 ± 30 ms (100 %F.S. → 10 %F.S. < T ≤ 80 %F.S.) ≤2 s (100 %F.S. → 0.5 %F.S. < T ≤ 10 %F.S.) ≤200 ms (100 → F.S. → 0 %F.S. (Valve closed))
Flow response time adjustment
(Tunable Response) *5 *6
Tunable range 300 ms ≤ T ≤ 1000 ms (0.3 s ≤ T ≤ 1 s)
Adjustment accuracy User specified time ± 50 ms (± 0.05 s)
Supply pressure condition≤ 450 kPa (G)
Operating differential pressuremax400 kPa (D)
min100 kPa (D) (Supply pressure < 150 kPa (A))
50 kPa (D) (Supply pressure ≥ 150 kPa (A))
100 kPa (D)200 kPa (D)
Proof pressure1 MPa (G)
Flow rate at fully closed control valve *7≤ 0.1 %F.S.(N.C.valve) ≤ 0.2 %F.S.
(N.O.valve) ≤ 0.5 %F.S.
Pressure transient sensitivity *8≤± (1.5 %F.S. + 1.5 %S.P.)≤± 1.0 %F.S.
Pressure measurement accuracy≤± 3.5 kPa (Measurement range : 0-700 kPa (A))
Operating temperature *915-60℃
Temperature measurement accuracy≤± 2℃ (Measurement range : 15-60℃)
Leak integrity

≤ 5 × 10-12 Pa • m3/s (He)

Valve typeNormally closed : N.C. Normally opend : N.O.
Wetted materialsSUS316 L, Ni-alloy, PFA (Bin#01-#04)
Fitting

1/4 inch VCR equivalent fitting-to-fitting dimension 124 mm

1.125 inch C-Seal Port-to-port dimension 92 mm

1.125 inch W-Seal Port-to-port dimension 92 mm

Communication interface

M12 (5 pin) male connector DeviceNet™protocol *10

RJ45 connector × 2

EtherCAT®protocol *11

Service communication port

φ2.5 port

Dedicated RS-485 communication

Power supply

M12 (5 pin) male connector 24 VDC, 7.5 VA Applicable for ODVA standard *10

M8 (5 pin) male connector

24 VDC ± 4 V, 7.5 VA *11

Weight1.3kg *10   /   1.1kg *11
Mounting orientationFree
Warm-up operation time≥ 60 minutes
Storage temperature0-80℃ (Non condensing)

*1: Value applicable to a calibration gas (N2) or the gas types measured with our benchmark equipment. *2: Flow rate accuracy with the ambient temperature at 23 ± 2℃ (in compliance with SEMI E56-0309). *3: Complies with
"repeatability" as defined by SEMI E56-0309. *4: Zero point output stability in compliance with SEMI E69-0298. *5: The response time is defined as the time that it takes for the product's flow rate output to reach 98 % of the amount of
the change set for the flow rate. For any change in flow rate control to 0 %F.S. (valve closed), the response time is defined as the time it takes for the product's flow rate output to reach 0.5 %F.S. *6: The value in our conditions as
based on the use of a calibration gas (N2). *7: Flow rate when the control valve is fully closed and a calibration gas (N2) is supplied at 450 kPa (G). *8: Flow rate variation amount where a 2 psi pressure change (in compliance with
SEMI F64-0701) occurs in a 1second period when flow rate control is applied between 5 %F.S. and 100 %F.S. in our conditions as based on the use of a calibration gas (N2). *9: The product's temperature output constitutes the
benchmark. The product's temperature may rise higher than the environmental temperature if a source of heat exists in the vicinity of the product or if multiple units of the product have been installed in close proximity to each other.
*10: DeviceNet™ communication model. *11: EtherCAT® communication model.

  • In notation of pressure unit, (D) shows differential pressure, (G) shows gauge pressure, (A) shows absolute pressure. ???? SCCM, SLM are symbols representing the gas flow rate (ml/min, l/min, at 0℃ 101.3 kPa).
  • % F.S.is the percentage of the set full scale flow rate. % S.P. is a percentage of the set flow rate setting.

Informationsanfrage

Sie haben Fragen oder Wünsche? Nutzen Sie dieses Formular, um mit unseren Spezialisten in Kontakt zu treten.

* Diese Felder sind Pflichtfelder.

Related products

FS-3000
FS-3000

Thermal Flow Splitter

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

AFCU-360M
AFCU-360M

Function Control Unit with Mass Flow Controllers

ASGU-370P
ASGU-370P

Automatic Span Gas Unit for Parallel calibration

ASGU-370S
ASGU-370S

Automatic Span Gas Unit for Serial calibration

ASGU-370TS
ASGU-370TS

Automatic Span Gas Unit Transferstandard

ASGU-370TS SPLIT
ASGU-370TS SPLIT

Automatic Span Gas Generator Unit for Quality control at field test

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

FS-3000
FS-3000

Thermal Flow Splitter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

Corporate