VG S Series

Capacitance Manometer

Absolute pressure measurement is crucial for most of vacuum processes in various industries including Semiconductor, FPD, HDD, PV and Coating. A capacitance manometer determines the total pressure from the deformation of the diaphragm that occurs when a pressure difference is applied to both side of the diaphragm. The strong points of the capacitance manometer over other methods are:

•Higher precision

•Less gas dependence in pressure output

•Relatively resistant to corrosive gases