SEC-E Series

Mass Flow Controller SEC-E Series

Mass Flow Controller

This general purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller sec-e series can be used in a wide range of industries.

Gas flow through the mass flow controller can be controlled over a range of flows: from 10 SCCM to 200 SLM.

View our MFC comparison chart here.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Equipped with a reliable thermal sensor and solenoid valve
  • Wide range of flow rate control: from 10 SCCM to 200 SLM (N2)
  • Suitable for a wide range of applications
  • Integration into various manufacturing systems, including those for: LCDs, photovoltaic cells, power semiconductors, coatings
    • General industries: control of burner gases, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume
    • Research & Development: equipment for performance evaluation of various gas sensors, and combustors; biotechnology-related evaluation
    • Laboratories: gas flow controllers for various experiments, sampling gases, etc.

 

 

Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement

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