HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

A high-concentration conductivity meter ideal for chemical solutions and wastewater management in semiconductor manufacturing and FPD (Flat Panel Display) manufacturing processes.

This unit employs a chemical-resistant 4-pole carbon sensor. It can measure across a wide-range without actually switching, and is equipped with a concentration conversion function, making it suitable for measuring the conductivity of a wide range of chemicals used in processes such as semiconductor cleaning.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Wide-range compatible
Capable of measuring up to 1000 mS/cm. (The measurement range of conductivity before temperature compensation)

Automatic switching for display range
Automatically switching display range from high concentration to low concentration. Furthermore, it is possible to monitor changes while maintaining effective conductivity resolution.

Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics.

High quality chemical-resistant sensor
A chemical-resistant 4-pole carbon sensor is in use, making it compatible with a wide range of chemical solutions used in semiconductor cleaning processes.

Model	HE-960HC
Measurement range	0 - 1000mS/cm
Wetted materials	GC, Karletz, PFA
Sensor input	1 ch
Repeatability	+/- 0.5% of the full scale (in equivalent input)
Linearity	+/- 0.5% of the full scale (in equivalent input)
Transmission output	Number of output: 4
Contact output	Outputs: 5 points
Communication output	RS-485
Ambient environment	Temperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation)
Power supply	100 to 240 V AC ±10%, 50/60 Hz, 20 VA (max)
Protective structure	Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass	Approx. 550 g
Conforming standards	CE marking, FCC Part 15
Compatible sensors	FES-510 series