Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC

Carbon Sensor Conductivity Meter

A low-concentration conductivity meter that incorporates highly chemical-resistant carbon sensors.

Ideal for the recovery of chemicals and pure water in semiconductor manufacturing and FPD (Flat Panel Display) manufacturing processes.  By adopting a chemically resistant two-pole carbon sensor, it measures the conductivity of chemicals, making it suitable for the management of concentration, management of chemical dilution, and monitoring the recycling of ultrapure water during various processes.


DC24VTransmission OutputContact OutputRS-485Single ComponentLow Concentration

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Sensor with Excellent Chemical Resistance

The sensor employs a chemically resistant two-pole flow-through carbon sensor, making it compatible with a wide range of chemicals used in semiconductor cleaning processes.

Metal Contamination-free

With the use of a special carbon material as the electrode, there is no concern of metal contamination.

Wide-range Compatible

Capable of measuring up to a maximum of 1000 μS/cm (measuring range of conductivity before temperature compensation).

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemicals.

Specificationd of HE-960LC
Measurement range0 - 1000 μS/cm (cell constant: 0.1/cm)*
0 - 10000 μS/cm (cell constant: 1/cm)*
RepeatabilityCell constant0.1/cm1.0/cm
0 to 1000 µS/cm+/- 0.5% FS-
0 to 2000 µS/cm-+/- 0.5% FS
2000 to 10000 µS/cm-+/- 0.5% FS
0.0 to 100 deg.C+/- 0.5 deg.C

* Measurement range of raw conductivity


Solicitud de Información

Tiene alguna pregunta o solicitud? Utilice este formulario para ponerse en contacto con nuestros especialistas. * Estos campos son obligatorios.