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HF-960H_Brochure
HF-960H
HF / HCl Concentration Monitor
Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Measurement range : 0 - 10 %
- Automatic display range switching
- Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
- 24 V DC power supply
- RoHS compliant
| Model | HF-960H |
|---|---|
| Measurement range | HF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm |
| Power supply | 24 V DC ±10%, 10 W (max.) |
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
| Mass | Approx. 550 g |
| Conforming standards | CE marking, FCC Part 15 |
| Compatible sensors | FES-510 Series (flow-type carbon sensor) |
Schematics
