Model | OZ-96 |
|---|---|
Measurement target | Ozone concentration in ultra-pure water |
Measurement principle | UV absorption (254 nm) |
Measuring range | 0-100 mg/L |
Reproducibility | Within ±0.5 mg/L |
Stability | Zero point change : Within 0.5 mg/L/day Span sensitivity change: Within 0.5 mg/L/day |
Transmission output | 4-20 mA DC isolated input/output type max. load resistance: 500 Ω |
Transmission output range | 0-5, 0-10, 0-20, 0-50, 0-100 (mg/L) |
Control function | 4-channel contact output capacity: 250 V AC, 3 A max. Low lower limit, lower limit, upper limit, high upper limit |
Additional functions | Zero point calibration Span sensitivity adjustment (coefficient input) Simple operation confirmation |
Measurement conditions | Pressure: Within 0.3 MPa Flow rate: 100 mL/min (50-300 mL/min) Temperature: 5-30°C Purge detector with dry air under conditions of moisture condensation |
Power supply | DC 24 V, 2 A |
Structure | Panel-mounted: DIN 96 x 96, Indoor installation Case: SPCC Panel: ABS |
External dimensions | 96(W) x 96(H) x 145(D), case depth: 135 mm |
Weight | Approx. 650 g |
용존 오존모니터 OZ-96
기술의 발전으로 오존수가 반도체 세척 공정과 resist separation공정에서 쓰이고 있습니다. 용존 오존농도모니터OZ-96은 저농도에서부터 고농도까지의 넓은 범위의 측정이 가능합니다.
Segment:
Semiconductor
Division:
Wet Process Control
Manufacturing Company:
HORIBA Advanced Techno Co., Ltd.