HD-960L

저농도 용존 산소 모니터

고안정성 측정은 저농도 HF에서 산소를 용해시킵니다. 3가지 측정 범위를 μg/L에서 mg/L로 자동 전환합니다. 측정 범위 : 0 ~ 20.00 mg/L

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Automatic range-switching function
Automatically switches between three measurement ranges from μg/L to mg/L, making measurement possible with the most suitable resolving power.
Standard installation of communication function (RS-485)
It is possible to check measured value, change and control the settings in an instrumentation area apart from where the unit is used.
Easy-to-use calibration function
The HD-960L has a function for zero electricity/zero gas calibration and span calibration.
Capable of measuring small samples
Can take measurements at a minimum flow rate of 15 ml/min.

Model Name	HD-960L
Measurement range Repeatability	Measurement range	Repeatability
	0.0 to 200.0 μg/L	+/-1% FS
	200 to 2000μg/L	+/-1% FS
	2.00 to 20.00mg/L	+/-1% FS
Conditions measurement sample	Sample Pressure	0 to 0.1MPa
	Sample flow rate	15 to 200ml /min.
	Sample temperature	10 to 45 °C
	Sample HF concentration	0 to 5000ppm
Transmission output	4-20mA, 4points
Contact output	4 points
Power supply	DC24V +/- 10% 15W
Combined Sensor unit	DO-100
Combined Sensor	#5600
Sample inlet/outlet	1/4 inch tube