Semiconductor Page Heading

Factory Emission Gas Analyzer

HORIBA has over 100,000 CEM systems installed and 30 years of quality and experience, and it performs the continuous simultaneous and high-precision measurement of NOx, SO2, CO, CO2, O2, CH4 and N2O

HORIBA also contributes to monitoring quality control of manufactured high-purity gases at air separation and semiconductor plants.

Related Products

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

Серия VA-5000 / VA-5000WM
Серия VA-5000 / VA-5000WM

Многокомпонентный газоанализатор

AP-380 Series
AP-380 Series

Air Quality Monitor

GA-370

Монитор следовых газов

серия ENDA-5000
серия ENDA-5000

Система анализа дымовых газов

Corporate