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Chemical Monitoring

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

Related Products

CS-100 Series
больше CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
больше CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
больше CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
больше CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
больше CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
больше CS-900

Non-Contact Chemical Concentration Monitor

HD-960L
больше HD-960L

Dissolved Oxygen Monitor in Low Concentration

HD-960LR
больше HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HE-480C-GC
больше HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480R(W)
больше HE-480R(W)

Industrial resistivity meter

HE-960CA
больше HE-960CA

Citric Acid Monitor

HE-960H-TM
больше HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
больше HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
больше HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
больше HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
больше HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
больше HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
больше HE-960RW-GC(W)

2-Channel Resistivity Meter

HE-960TM
больше HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

HF-960EM
больше HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
больше HF-960H

HF / HCl Concentration Monitor

HF-960M
больше HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
больше HF-SP-CU

2-channel High Precision HF Concentration Monitor

HP-480(W)
больше HP-480(W)

Industrial pH meter

HZ-960
больше HZ-960

Dissolved Ozone Monitor

SLIA-300
больше SLIA-300

Highly Sensitive Silica Monitor

UP-100
больше UP-100

Micro Volume pH Monitor

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