Infrared Measurement

Technology to analyze components in gases in real time using infrared

Infrared measurement is a technology that can be used in various ways.  It can be used to detect infrared radiation reflected from a solid object and also to detect absorption in gases.  These methods allow the user to find information about temperature and condition of a certain object, and in the absorption method, the concentration of materials in the gas phase.  It features high precision and stability, and is utilized in diverse fields including semiconductors.

Non-dispersive Infrared Absorption Spectroscopy (NDIR)

This gas analysis technology utilizes infrared absorption to enable stable concentration measurement, contributing to optimized chamber cleaning times and reduced cleaning gas consumption – an important consideration in the reduction of greenhouse gases (GHG).

Infrared Laser Absorption Modulation (IRLAM)

HORIBA's proprietary infrared laser absorption modulation-based “IRLAM™,” enables real-time, in-process monitoring of gases. It achieves high-sensitivity, high-speed measurement of low concentrations at the ppb level.

Infrared and Radiation Thermometers

The IT-270 measures the surface temperature of objects using a non-contact high-precision infrared technique.

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