SLIA-300

Highly sensitive silica monitor for ultrapure water management in semiconductor/FPD processes

A proven track record in silica analysis of ultrapure water!
Compact/highly sensitive new performance.

Concentration of silica in ultrapure water has a significant impact on product precision and yield in semiconductor/FPD processes. Reliably meeting measurement requirements of 1μg/L (1ppb). High-sensitivity measurements across the entire measurement range in a compact desktop body design have been achieved. With excellent basic performance and high sensitivity, including high-speed responsiveness and self-diagnostic capabilities, it strongly supports the ultrapure water processes in semiconductor/FPD manufacturing.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

High sensitivity with excellent repeatability
A unique newly developed cell realizes high sensitivity corresponding to low concentrations. Quick 5-minute measurements guarantee repeatability of ±2% of full scale in the 0 to 2 μg/L range.

Compact desktop design
A newly developed cell realizes a revolutionary compact design. This desktop design can be used in a variety of installation conditions, including small spaces. It is also possible to be used as a portable device.

Reagent consumption is reduced to 1/5
Adopting an improved reaction cell, the consumption of reagents has been reduced to 1/5 of conventional reagents. Running costs for reagents can be significantly reduced.

Capable of measuring up to 6 points (optional)
1 to 6 points of measurement can be freely set. A single unit can be used to support multipoint measurements.

Self-diagnostic function to monitor operational abnormalities
Self-diagnostic function detects abnormalities in operations such as sample and reagent injection, calibration errors, cell temperature monitoring, and abnormality in light source. In case of errors, a message is sent using an alarm indication lamp as well as text display to notify the user.

A maintenance-free, long-lasting light source that does not require replacement has been adopted
A monochromatic semiconductor light source with stable light intensity and long life is in use. It can be used as a semi-permanent light source.

Model	SLIA-300
Principle	Molybdenum blue method
Measuring range	0 to 2/0 to 20µg/L or 0 to 5/0 to 50 µg/L (specified when ordering)
Repeatability	±2% of full scale
Measuring time	5 minutes
Measuring cycle	5 to 995 minutes
Indication	· Measuring value: 3.5 digits, 7-segment LCD · Guidance: 16 characters x 4 lines, dot matrix LCD
Measuring point	1 to 6 points (specified when ordering)
Calibration	Standard calibration solution (from factory)
Compensation	Blank, Calibration curve (per line)
Reagent	· Reagent A: Sulfuric acid + ammonium molybdate · Reagent B: Oxalic acid · Reagent C: L (+) - ascorbic acid
Reagent replacement cycle	1 week (Manufacture’s recommendation)
Power	100 to 240 V AC 50/60 Hz
Power consumption	Approx. 600 VA
Environment condition	· Location: Indoor · Temperature: 10 to 35°C · Humidity: 85% or less
Sample condition	· Sample water temperature: 15 to 35°C · Flow rate: 200 to 250 mL/min (should be adjustable) · Pressure: 0.1 to 0.5 MPa (to be constant)
Dimension	375 (H) x 580 (W) x 500 (D) mm 14.8 (H) x 22.8 (W) x 19.7 (D) in
Mass	Approx. 41 kg (additional 1 kg per sampling point)
External input/output	Output	4 to 20 mA DC, 0 to 16 mA DC, or 0 to 1 V DC (specified when ordering)
	Contact output	· Measuring lines (common): Measurement, Sync signal, Alarm^※, Heater, Power-off calibration signal 1, 2, Concentration upper limit, or Sample-off^※ · Measuring lines (individually): Measuring range, Sample-off, or Concentration upper limit^※ ※marked notes should be specified when ordering.
	Contact input	· Measuring lines (common): Calibration start, Measurement start, Economy operation, Line selection, Low range measurement, High range measurement
	Serial input/output	RS-232C
Option	Sample heating unit, Standard solution supply unit, Reagent kit
Conformity Standard	CE, KC, FCC RulesPart15, UKCA