There are various types of exhaust gas treatment equipment on the roofs of semiconductor manufacturing plants, including combustion, wet, dry, and catalytic types. The role of exhaust gas treatment equipment (scrubbers) is considered extremely important.
There is also a demand for efficient removal of PFC gases (such as CF₄ and SF₆) that have high GWP factors, as well as the establishment of monitoring. HORIBA provide a monitoring solution for PFC gases from POU-Abatement to Roof scrubber to atmospheric release, and contribute to strengthening the monitoring and detection of hydrogen chloride, fluorine, ammonia, etc.
Multi-Component Gas Analyzer
Air Quality Monitor